Homogenization of CZ Si wafers by Tabula Rasa annealing
Author:
Publisher
Elsevier BV
Subject
Electrical and Electronic Engineering,Condensed Matter Physics,Electronic, Optical and Magnetic Materials
Reference14 articles.
1. On the Properties of the Intrinsic Point Defects in Silicon: A Perspective from Crystal Growth and Wafer Processing
2. A microscopically accurate continuum model for void formation during semiconductor silicon processing
3. Coupled-flux nucleation modeling of oxygen precipitation in silicon
4. Modeling of transient point defect dynamics in Czochralski silicon crystals
5. Intrinsic Point Defects and Impurities in Silicon Crystal Growth
Cited by 5 articles. 订阅此论文施引文献 订阅此论文施引文献，注册后可以免费订阅5篇论文的施引文献，订阅后可以查看论文全部施引文献
1. Influence of Tabula Rasa on Process- and Light-Induced Degradation of Solar Cells Fabricated From Czochralski Silicon;IEEE Journal of Photovoltaics;2020-11
2. Dissolution of Oxygen Precipitate Nuclei in n-Type CZ-Si Wafers to Improve Their Material Quality: Experimental Results;IEEE Journal of Photovoltaics;2017-01
3. Precipitation in silicon wafers after high temperature preanneal studied by X-ray diffraction methods;Physica B: Condensed Matter;2012-08
4. Studies of influence of high temperature preannealing on oxygen precipitation in CZ Si wafers;Journal of Crystal Growth;2012-06
5. Oxygen Precipitation Studied by X-Ray Diffraction Techniques;Solid State Phenomena;2011-08
1.学者识别学者识别
2.学术分析学术分析
3.人才评估人才评估
"同舟云学术"是以全球学者为主线，采集、加工和组织学术论文而形成的新型学术文献查询和分析系统，可以对全球学者进行文献检索和人才价值评估。用户可以通过关注某些学科领域的顶尖人物而持续追踪该领域的学科进展和研究前沿。经过近期的数据扩容，当前同舟云学术共收录了国内外主流学术期刊6万余种，收集的期刊论文及会议论文总量共计约1.5亿篇，并以每天添加12000余篇中外论文的速度递增。我们也可以为用户提供个性化、定制化的学者数据。欢迎来电咨询！咨询电话：010-8811{复制后删除}0370
www.globalauthorid.com
TOP
Copyright © 2019-2024 北京同舟云网络信息技术有限公司 京公网安备11010802033243号 京ICP备18003416号-3