Subject
Electrical and Electronic Engineering,Condensed Matter Physics,Electronic, Optical and Magnetic Materials
Reference31 articles.
1. Group III nitride and SiC based MEMS and NEMS: materials properties, technology and applications;Cimalla;J. Phys. Appl. Phys.,2007
2. A brittleness transition in silicon due to scale;Gerberich;J. Mater. Res.,2012
3. Nanotechnology: MEMS and NEMS and their applications to smart systems and devices;Varadan;Proc. SPIE,2003
4. Investigation of the Young's modulus and the residual stress of 4H-SiC circular membranes on 4H-SiC substrates;Messaoud;Micromachines,2019
5. Mechanical Properties of Silicon Carbide (SiC) Thin Films;Reddy,2007
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