Understanding of hybrid PVD–PECVD process with the aim of growing hard nc-TiC/a-C:H coatings using industrial devices with a rotating cylindrical magnetron-Reference-Cited by-同舟云学术

Understanding of hybrid PVD–PECVD process with the aim of growing hard nc-TiC/a-C:H coatings using industrial devices with a rotating cylindrical magnetron

Published:2014-09 Issue: Volume:255 Page:118-123
ISSN:0257-8972
Container-title:Surface and Coatings Technology
language:en
Short-container-title:Surface and Coatings Technology

Author:

Žemlička Radek,Jílek Mojmír,Vogl Petr,Souček Pavel,Buršíková Vilma,Buršík Jiří,Vašina Petr

Funder

GACR

European Regional Development Fund

Publisher

Elsevier BV

Subject

Materials Chemistry,Surfaces, Coatings and Films,Surfaces and Interfaces,Condensed Matter Physics,General Chemistry

Reference22 articles.

1. Compositional, structural and mechanical characteristics of nc-TiC/a-C:H nanocomposite films

2. Evaluation of composition, mechanical properties and structure of nc-TiC/a-C:H coatings prepared by balanced magnetron sputtering

3. Deposition and some properties of nanocrystalline, nanocomposite and amorphous carbon-based coatings for tribological applications

4. CRC Materials Science and Engineering Handbook;Shackelford,2001

5. A nanoscale approach for the characterization of amorphous carbon-based lubricant coatings

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1. The influence of different power supply modes on the microstructure, mechanical, and corrosion properties of nc-TiC/a-C:H nanocomposite coatings;Surface and Coatings Technology;2021-09

2. On the effect of the substrate to target position on the properties of titanium carbide/carbon coatings;Surface and Coatings Technology;2017-11

3. On the significance of running-in of hard nc-TiC/a-C:H coating for short-term repeating machining;Surface and Coatings Technology;2017-04

4. Investigation of the Influence of Ni Doping on the Structure and Hardness of Ti-Ni-C Coatings;Journal of Nanomaterials;2017

5. Principles and practice of an automatic process control for the deposition of hard nc-TiC/a-C:H coatings by hybrid PVD-PECVD under industrial conditions;Surface and Coatings Technology;2016-10