Production of low electron temperature ECR plasma
Author:
Publisher
Elsevier BV
Subject
Materials Chemistry,Surfaces, Coatings and Films,Surfaces and Interfaces,Condensed Matter Physics,General Chemistry
Reference22 articles.
1. Low Temperature Chemical Vapor Deposition Method Utilizing an Electron Cyclotron Resonance Plasma
2. Metastable chlorine ion transport in a diverging field electron cyclotron resonance plasma
3. Charge accumulation effects on profile distortion in ECR plasma etching
4. Electron cyclotron resonance plasma source for metalorganic chemical vapor deposition of silicon oxide films
5. Synthesis and crystal structure of (ThCu3)(Mn3+2Mn4+2)O12, a new ferrimagnetic perovskite-like compound
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