Characterization of composite piezoelectric thick film for MEMS application-Reference-Cited by-同舟云学术

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Characterization of composite piezoelectric thick film for MEMS application

Published:2005-08 Issue:1-3 Volume:198 Page:384-388
ISSN:0257-8972
Container-title:Surface and Coatings Technology
language:en
Short-container-title:Surface and Coatings Technology

Author:

Wang Zhihong,Zhu Weiguang,Chao Chen,Zhao Changlei,Chen Xiaofeng

Publisher

Elsevier BV

Subject

Materials Chemistry,Surfaces, Coatings and Films,Surfaces and Interfaces,Condensed Matter Physics,General Chemistry

Reference15 articles.

1. Characterization of sol-gel Pb(Zr0.53Ti0.47)O3 films in the thickness range 0.25–10 μm

2. Actuation Properties of Lead Zirconate Titanate Thick Films Structured on Si Membrane by the Aerosol Deposition Method

3. Influence of Carrier Gas Conditions on Electrical and Optical Properties of Pb(Zr, Ti)O3Thin Films Prepared by Aerosol Deposition Method

4. Preparation of Lead Zirconate Titanate Thick Films by Arc-Discharged Reactive Ion-Plating Method

5. Preparation of Pb(Zr0.53Ti0.47)O3Thick Films by an Interfacial Polymerization Method on Silicon Substrates and Their Electric and Piezoelectric Properties

Cited by 17 articles. 订阅此论文施引文献订阅此论文施引文献，注册后可以免费订阅5篇论文的施引文献，订阅后可以查看论文全部施引文献

1. Structural and ferroelectric properties of textured KNN thick films prepared by sol-gel methods;Integrated Ferroelectrics;2016-11-21

2. Preparation and characterization of lead zirconate titanate thick films prepared by chemical solution deposition for MEMS applications;Ceramics International;2015-07

3. Waste Mechanical Energy Harvesting (I): Piezoelectric Effect;Waste Energy Harvesting;2014

4. Enhanced piezoelectric performance of composite sol-gel thick films evaluated using piezoresponse force microscopy;Journal of Applied Physics;2013-05-14

5. Influence of substrate deformation on piezoelectric displacement measurement of piezoelectric film;Ceramics International;2013-05

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