Ion bombardment effects on nucleation of sputtered Mo nano-crystals in Mo/B4C/Si multilayers-Reference-Cited by-同舟云学术

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Ion bombardment effects on nucleation of sputtered Mo nano-crystals in Mo/B4C/Si multilayers

Published:2006-09 Issue:1-2 Volume:201 Page:143-147
ISSN:0257-8972
Container-title:Surface and Coatings Technology
language:en
Short-container-title:Surface and Coatings Technology

Author:

Patelli A.,Rigato V.,Salmaso G.,Carvalho N.J.M.,De Hosson J.Th.M.,Bontempi E.,Depero L.E.

Publisher

Elsevier BV

Subject

Materials Chemistry,Surfaces, Coatings and Films,Surfaces and Interfaces,Condensed Matter Physics,General Chemistry

Reference27 articles.

1. Extreme ultraviolet lithography

2. Thermal stability of Mo/C/Si/C multilayer soft X-ray mirrors

Cited by 12 articles. 订阅此论文施引文献订阅此论文施引文献，注册后可以免费订阅5篇论文的施引文献，订阅后可以查看论文全部施引文献

1. Possibilities and analytical aspects of the PIGE method for the study of B4C;Journal of Radioanalytical and Nuclear Chemistry;2021-07-26

2. Microstructure and Density of Mo Films in Multilayer Mo/Si Mirrors;Journal of Surface Investigation: X-ray, Synchrotron and Neutron Techniques;2019-01

3. On the Properties of WC/SiC Multilayers;Applied Sciences;2018-04-06

4. Fiber texture of sputter deposited molybdenum films and structural zone model;Materials Chemistry and Physics;2014-06

5. Effect of working gas pressure on interlayer mixing in magnetron-deposited Mo/Si multilayers;Optical Engineering;2013-09-20

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