Evolution of composition, microstructure and optical properties of yttrium oxide thin films with substrate temperature-Reference-Cited by-同舟云学术

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Evolution of composition, microstructure and optical properties of yttrium oxide thin films with substrate temperature

Published:2013-08 Issue: Volume:229 Page:226-230
ISSN:0257-8972
Container-title:Surface and Coatings Technology
language:en
Short-container-title:Surface and Coatings Technology

Author:

Lei Pei,Zhu Jiaqi,Zhu Yuankun,Jiang Chunzhu,Yin Xunbo

Publisher

Elsevier BV

Subject

Materials Chemistry,Surfaces, Coatings and Films,Surfaces and Interfaces,Condensed Matter Physics,General Chemistry

Reference41 articles.

1. Effects of precursor evaporation temperature on the properties of the yttrium oxide thin films deposited by microwave electron cyclotron resonance plasma assisted metal organic chemical vapor deposition

2. Structural transition of crystalline Y2O3 film on Si(111) with substrate temperature

3. Growth and characterization of yttrium oxide films by reactive magnetron sputtering

4. Electrical and structural characteristics of yttrium oxide films deposited by rf-magnetron sputtering on n-Si

5. Rare-earth oxide thin films as gate oxides in MOSFET transistors

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