Effects of residual stress distribution on the cracking of thick freestanding diamond films produced by DC arc jet plasma chemical vapor deposition operated at gas recycling mode-Reference-Cited by-同舟云学术

Effects of residual stress distribution on the cracking of thick freestanding diamond films produced by DC arc jet plasma chemical vapor deposition operated at gas recycling mode

Published:2007-04 Issue:15 Volume:201 Page:6553-6556
ISSN:0257-8972
Container-title:Surface and Coatings Technology
language:en
Short-container-title:Surface and Coatings Technology

Author:

Li Chengming,Li Hao,Niu Decao,Lu Fanxiu,Tang Weizhong,Chen Guanchao,Zhou Hai,Chen Fei

Publisher

Elsevier BV

Subject

Materials Chemistry,Surfaces, Coatings and Films,Surfaces and Interfaces,Condensed Matter Physics,General Chemistry

Reference17 articles.

1. Diamond thin films: a 21st-century material

2. CVD diamond films: from growth to applications

3. Diamond thick film deposition in wafer scale using single-cathode direct current plasma assisted chemical vapour deposition

4. Characterisation of CVD grown diamond and its residual stress state

5. Behavior of residual stress on CVD diamond films

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