Reactive sputtering of hard nitride coatings using asymmetric-bipolar pulsed DC generator
Author:
Publisher
Elsevier BV
Subject
Materials Chemistry,Surfaces, Coatings and Films,Surfaces and Interfaces,Condensed Matter Physics,General Chemistry
Reference41 articles.
1. High-rate reactive DC magnetron sputtering of oxide and nitride superlattice coatings
2. Thin Film Processes,1978
3. Very-high-rate reactive sputtering of alumina hard coatings
4. High-rate reactive d.c. magnetron sputtering of ZrOx coatings
5. Aspects and results of long-term stable deposition of Al2O3 with high rate pulsed reactive magnetron sputtering
Cited by 51 articles. 订阅此论文施引文献 订阅此论文施引文献,注册后可以免费订阅5篇论文的施引文献,订阅后可以查看论文全部施引文献
1. Change with the Reactive Deposition Mode in Crystallographic and Mechanical Properties of Titanium Aluminum Nitride Coatings Obtained Via Grid-Assisted Magnetron Sputtering;Materials Research;2023
2. Transition metal nitride/oxide-based multilayer PVD coating with sol–gel derived ormosil passivation layer as an efficient solar absorber: Studies on high temperature stability and performance evaluation;Solar Energy;2022-06
3. Impact Resistance and Properties of (Cr,Al,Si)N Coatings Deposited by Gas Flow Sputtering with Pulsed DC Supply;Advanced Engineering Materials;2021-10-31
4. Measurement of Ion Energy Distribution and Deposition of Ti Thin Films Using ABPPS Technology on Glass Substrate;Coatings;2021-07-28
5. Effect of TiN, TiAlCN, AlCrN, and AlTiN ceramic coatings on corrosion behavior of tungsten carbide tool;Journal of the Australian Ceramic Society;2020-11-05
1.学者识别学者识别
2.学术分析学术分析
3.人才评估人才评估
"同舟云学术"是以全球学者为主线,采集、加工和组织学术论文而形成的新型学术文献查询和分析系统,可以对全球学者进行文献检索和人才价值评估。用户可以通过关注某些学科领域的顶尖人物而持续追踪该领域的学科进展和研究前沿。经过近期的数据扩容,当前同舟云学术共收录了国内外主流学术期刊6万余种,收集的期刊论文及会议论文总量共计约1.5亿篇,并以每天添加12000余篇中外论文的速度递增。我们也可以为用户提供个性化、定制化的学者数据。欢迎来电咨询!咨询电话:010-8811{复制后删除}0370
www.globalauthorid.com
TOP
Copyright © 2019-2024 北京同舟云网络信息技术有限公司 京公网安备11010802033243号 京ICP备18003416号-3