Deposition of silicon-containing diamond-like carbon films by plasma-enhanced chemical vapour deposition
Author:
Publisher
Elsevier BV
Subject
Materials Chemistry,Surfaces, Coatings and Films,Surfaces and Interfaces,Condensed Matter Physics,General Chemistry
Reference15 articles.
1. Temperature effect on bonding structures of amorphous carbon containing more than 30at.% silicon
2. Wear behavior of silicon-containing diamond-like carbon coatings
3. Effects of Si content in DLC films on their friction and wear properties
4. Incorporation of Si in a-C:Si:H films monitored by infrared excited Raman scattering
5. Relationship between bonding structure and mechanical properties of amorphous carbon containing silicon
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