Evolution of microstructure and properties of TiNbCrAlHfN films grown by unipolar and bipolar high-power impulse magnetron co-sputtering: The role of growth temperature and ion bombardment-Reference-Cited by-同舟云学术

Evolution of microstructure and properties of TiNbCrAlHfN films grown by unipolar and bipolar high-power impulse magnetron co-sputtering: The role of growth temperature and ion bombardment

Published:2023-04 Issue: Volume:459 Page:129389
ISSN:0257-8972
Container-title:Surface and Coatings Technology
language:en
Short-container-title:Surface and Coatings Technology

Author:

Du Hao,Shu Rui,Boyd Robert,le Febvrier Arnaud,Helmersson Ulf,Eklund Per,Lundin Daniel

Funder

Eurostars

Swedish Foundation for Strategic Research

National Natural Science Foundation of China

VINNOVA

Guizhou Province Science and Technology Foundation

Knut and Alice Wallenberg Foundation

Swedish Research Council

Publisher

Elsevier BV

Subject

Materials Chemistry,Surfaces, Coatings and Films,Surfaces and Interfaces,Condensed Matter Physics,General Chemistry

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