Study on reactive sputtering of yttrium oxide: Process and thin film properties-Reference-Cited by-同舟云学术

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Study on reactive sputtering of yttrium oxide: Process and thin film properties

Published:2015-08 Issue: Volume:276 Page:39-46
ISSN:0257-8972
Container-title:Surface and Coatings Technology
language:en
Short-container-title:Surface and Coatings Technology

Author:

Lei Pei,Leroy Wouter,Dai Bing,Zhu Jiaqi,Chen Xiaoting,Han Jiecai,Depla Diederik

Funder

National Natural Science Foundation of China

National Natural Science Excellent Young Foundation of China

Doctoral Program Foundation of the Ministry of Education of China

Heilongjinag outstanding youth science fund

Publisher

Elsevier BV

Subject

Materials Chemistry,Surfaces, Coatings and Films,Surfaces and Interfaces,Condensed Matter Physics,General Chemistry

Reference50 articles.

1. Stability of rare earth oxides in a moist environment at elevated temperatures—experimental and thermodynamic studies part II: comparison of the rare earth oxides;Courcot;J. Eur. Ceram. Soc.,2010

2. Atomic layer deposition of Y2O3 thin films from yttrium tris(N, N′-diisopropylacetamidinate) and water;de Rouffignac;Chem. Mater.,2005

3. Cathodic electrodeposition and characterization of nanostructured Y2O3 from chloride solution part I: effect of current density;Aghazadeh;Russ. J. Electrochem.,2013

4. Effects of precursor evaporation temperature on the properties of the yttrium oxide thin films deposited by microwave electron cyclotron resonance plasma assisted metal organic chemical vapor deposition;Barve;Thin Solid Films,2011

5. Development of oxides dispersion strengthened steels for high temperature nuclear reactor application;Verhiest;J. Nucl. Mater.,2009

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