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Three-dimensional Particle-In-Cell simulation of ion characteristics in anode layer ion source

  • Published:2019-05 Issue: Volume:365 Page:102-108
  • ISSN:0257-8972
  • Container-title:Surface and Coatings Technology
  • language:en
  • Short-container-title:Surface and Coatings Technology

Author:

Li Pingchuan,Zhang Fan,Geng Shaofei,Zhao Jie,Tang Deli

Funder

National Natural Science Foundation of China

Applied Basic Research Programs of Sichuan Province

National Defense Basic Scientific Research Program of China

National Natural Science Foundation of China, China

Applied Basic Research Programs of Sichuan Province, China

Publisher

Elsevier BV

Subject

Materials Chemistry,Surfaces, Coatings and Films,Surfaces and Interfaces,Condensed Matter Physics,General Chemistry

Reference31 articles.

1. Industrial Ion Sources: Broadbeam Gridless Ion Source Technology;Zhurin,2012

2. Characteristics of end Hall ion source with magnetron hollow cathode discharge;Tang;Nucl. Inst. Methods Phys. Res. B,2007

3. A study on microstructure and properties of calcium phosphate coatings processed using ion beam assisted deposition on heated substrates;Travis;Surf. Coat. Technol.,2007

4. High current density anode layer ion sources;Keem,2001

5. Plasma and ion sources in large area coatings: a review;Anders;Surf. Coat. Technol.,2005
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