Piezoelectric ZnO thin films for 2DOF MEMS vibrational energy harvesting

Author:

Tao Kai,Yi HaipingORCID,Tang LihuaORCID,Wu JinORCID,Wang PeihongORCID,Wang Nan,Hu Liangxing,Fu Yongqing,Miao Jianmin,Chang Honglong

Funder

National Natural Science Foundation of China

Natural Science Foundation of Shaanxi Province

Fundamental Research Funds for the Central Universities

Engineering and Physical Sciences Research Council

Royal Society

Royal Academy of Engineering

Publisher

Elsevier BV

Subject

Materials Chemistry,Surfaces, Coatings and Films,Surfaces and Interfaces,Condensed Matter Physics,General Chemistry

Reference35 articles.

1. Highly stretchable and transparent thermistor based on self-healing double network hydrogel;Wu;ACS Appl. Mater. Interfaces,2018

2. A laterally driven MEMS inertial switch with double-layer suspended springs for improving single-axis sensitivity;Yang;IEEE Trans. Compon. Packag. Manuf. Technol.,2018

3. An improved interface and noise analysis of a turning fork micro gyroscope structure;Cao;Mech. Syst. Signal Process.,2016

4. An intrinsically stretchable humidity sensor based on anti-drying, self-healing and transparent organohydrogels;Wu;Mater. Horiz.,2018

5. Maximum power, optimal load, and impedance analysis of piezoelectric vibration energy harvesters;Liao;Smart Mater. Struct.,2018

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