Influence of the N2 partial pressure on the mechanical properties and tribological behavior of zirconium nitride deposited by reactive magnetron sputtering-Reference-Cited by-同舟云学术

Influence of the N2 partial pressure on the mechanical properties and tribological behavior of zirconium nitride deposited by reactive magnetron sputtering

Published:2008-04 Issue:15 Volume:202 Page:3653-3660
ISSN:0257-8972
Container-title:Surface and Coatings Technology
language:en
Short-container-title:Surface and Coatings Technology

Author:

Fragiel A.,Staia M.H.,Muñoz-Saldaña J.,Puchi-Cabrera E.S.,Cortes-Escobedo C.,Cota L.

Publisher

Elsevier BV

Subject

Materials Chemistry,Surfaces, Coatings and Films,Surfaces and Interfaces,Condensed Matter Physics,General Chemistry

Reference14 articles.

1. Zirconium nitrides deposited by dual ion beam sputtering: physical properties and growth modelling

2. High-temperature tribological characterization of zirconium nitride coatings

3. Investigations on non-stoichiometric zirconium nitrides

4. N-rich Zr–N films deposited by unbalanced magnetron sputtering enhanced with a highly reactive MW-ECR plasma

5. Ion beam assisted deposition of zirconium nitrides for modulated optical index structures

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