Industrial scale deposition of well adherent superhard and low friction C-DLC coatings grown by HIPIMS and anode assisted unbalanced magnetron sputtering
Author:
Publisher
Elsevier BV
Subject
Materials Chemistry,Surfaces, Coatings and Films,Surfaces and Interfaces,Condensed Matter Physics,General Chemistry
Reference38 articles.
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3. Tribological behavior of WC/WCN/CNx coatings deposited by high power impulse magnetron sputtering;Journal of Vacuum Science & Technology A;2023-04-20
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