Author:
Chang Jing-Tang,Kuo Chin-Chiuan
Subject
Materials Chemistry,Surfaces, Coatings and Films,Surfaces and Interfaces,Condensed Matter Physics,General Chemistry
Reference27 articles.
1. 4- sputter processing;Simon,2012
2. Chapter 3 - Magnetron discharges for thin films plasma processing;Musil,2006
3. A novel pulsed magnetron sputter technique utilizing very high target power densities;Kouznetsov;Surf. Coat. Technol.,1999
4. The ion energy distributions and ion flux composition from a high power impulse magnetron sputtering discharge;Bohlmark;Thin Solid Films,2006
5. High Power Impulse Magnetron Sputtering: Fundamentals, Technologies, Challenges And Applications,2020
Cited by
1 articles.
订阅此论文施引文献
订阅此论文施引文献,注册后可以免费订阅5篇论文的施引文献,订阅后可以查看论文全部施引文献