Hydrophilic/hydrophobic surface of Al 2 O 3 thin films grown by thermal and plasma-enhanced atomic layer deposition on plasticized polyvinyl chloride (PVC)-Reference-Cited by-同舟云学术

Hydrophilic/hydrophobic surface of Al 2 O 3 thin films grown by thermal and plasma-enhanced atomic layer deposition on plasticized polyvinyl chloride (PVC)

Published:2016-11 Issue: Volume:305 Page:158-164
ISSN:0257-8972
Container-title:Surface and Coatings Technology
language:en
Short-container-title:Surface and Coatings Technology

Author:

Wang Li-Chun,Han Yin-Yi,Yang Kai-Chiang^ORCID,Chen Miin-Jang,Lin Hsin-Chih,Lin Chung-Kwei,Hsu Yu-Tong

Funder

Ministry of Science and Technology

Publisher

Elsevier BV

Subject

Materials Chemistry,Surfaces, Coatings and Films,Surfaces and Interfaces,Condensed Matter Physics,General Chemistry

Reference34 articles.

1. Atomic layer deposited protective coatings for micro-electromechanical systems;Hoivik;Sensors Actuators A Phys.,2003

2. Electrical performance of Al2O3 gate dielectric films deposited by atomic layer deposition on 4H-SiC;Tanner;Appl. Phys. Lett.,2007

3. Atomic layer deposited ultrathin HfO2 and Al2O3 films as diffusion barriers in copper interconnects;Majumder;Electrochem. Solid-State Lett.,2007

4. Quartz crystal microbalance studies of Al2O3 atomic layer deposition using trimethylaluminum and water at 125°C†;Wind;The Journal of Physical Chemistry A,2009

5. Atomic Layer Deposition: An Enabler for Nanoscience and Nanotechnology;Gordon,2008

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