Molecular dynamics study of the growth of crystalline ZrO2
Author:
Funder
Grant Agency of the Czech Republic
Publisher
Elsevier BV
Subject
Materials Chemistry,Surfaces, Coatings and Films,Surfaces and Interfaces,Condensed Matter Physics,General Chemistry
Reference41 articles.
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3. Characterisation of ZrO2 films prepared by rf reactive sputtering at different O2 concentrations in the sputtering gases;Gao;Vacuum,2000
4. Scaling behavior and structure transition of ZrO2 films deposited by RF magnetron sputtering;Zhang;Vacuum,2009
5. High-k gate dielectrics: current status and materials properties considerations;Wilk;J. Appl. Phys.,2001
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