Subject
Instrumentation,Nuclear and High Energy Physics
Reference4 articles.
1. Synchrotrom radiation X-ray lithography
2. Proceedings Synchrotron Radiation Instrumentation;Betz,1986
3. presented at these Proceedings Synchrotron Radiation Instrumentation;Cerrina,1985
4. Speed enhancement of PMMA resist
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1. Design of an aspheric mirror for synchrotron radiation X-ray lithography beamline;Nuclear Instruments and Methods in Physics Research Section A: Accelerators, Spectrometers, Detectors and Associated Equipment;1994-08
2. X-ray stepper exposure system performance and status;Journal of Vacuum Science & Technology B: Microelectronics and Nanometer Structures;1990-11
3. X-ray lithography: On the path to manufacturing;Journal of Vacuum Science & Technology B: Microelectronics and Nanometer Structures;1989-11
4. Optimization of a synchrotron based x‐ray lithographic system;Review of Scientific Instruments;1989-07
5. Saddle Toroid Arrays: Novel Grazing Incidence Optics for Synchrotron X-Ray Lithography;Short Wavelength Coherent Radiation: Generation and Applications;1988