Author:
Xiao Jiabei,Cerrina Franco
Subject
Instrumentation,Nuclear and High Energy Physics
Cited by
5 articles.
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1. Investigation of the radiation-induced thermal flexure of an x-ray lithography mask during a tilted exposure;Journal of Vacuum Science & Technology B, Nanotechnology and Microelectronics: Materials, Processing, Measurement, and Phenomena;2011-01
2. Optical path function calculation for an incoming cylindrical wave;Advances in X-Ray/EUV Optics and Components IV;2009-08-20
3. Aspheric collimator for a point source x-ray lithography system;Journal of Vacuum Science & Technology B: Microelectronics and Nanometer Structures;1998-11
4. High-power free-electron lasers: Theory and applications;Journal of Russian Laser Research;1997-03
5. Applications of faceted mirrors to X-ray lithography beamlines;Nuclear Instruments and Methods in Physics Research Section A: Accelerators, Spectrometers, Detectors and Associated Equipment;1994-08