A collisional global sheath – Bulk model of argon plasma for semiconductor scale manufacturing

Author:

Elgendy A.T.,Basfer N.M.,Al-Harbi Nuha

Publisher

Elsevier BV

Subject

General Engineering

Reference17 articles.

1. Ali Khan, Muhammad Usman, et al., Bending analysis of polymer-based flexible antennas for wearable, general IoT applications: a review, Polymers 13 (2021) no. 3, 357 .

2. Impact of plasma induced damage on the fabrication of 3D NAND flash memory;Reiter;Solid-State Electron.,2022

3. Plasma boundary of nonlinear sheath dynamics for arbitrary waveforms in capacitive discharge;Elgendy;J. Phys: Conf. Ser.,2019

4. A T. Elgendy, H. Hatefinia, T. Hemke, M. Shihab, A. Wollny, D. Eremin, T. Mussenbrock, R.P. Brinkmann, arXiv preprint arXiv:1306.1664., 2013.

5. Plasmas Created in the Interaction of Antiprotons with Atomic and Ionized Hydrogen Isotopes. Suggested Fuels for Space Engines. Journal of High Energy Physics;Abdel-Raouf;Gravitation Cosmol.,2021

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