Structural properties of hydrogenated Al-doped diamond-like carbon films fabricated by a hybrid plasma system-Reference-Cited by-同舟云学术

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Structural properties of hydrogenated Al-doped diamond-like carbon films fabricated by a hybrid plasma system

Published:2018-08 Issue: Volume:87 Page:177-185
ISSN:0925-9635
Container-title:Diamond and Related Materials
language:en
Short-container-title:Diamond and Related Materials

Author:

Xu Wei,Zhou KeSong,Lin Songsheng,Dai Mingjiang,Shi Qian,Wei Chunbei

Funder

Scientific and Technical Foundation of Guangdong province

Publisher

Elsevier BV

Subject

Electrical and Electronic Engineering,Materials Chemistry,Mechanical Engineering,General Chemistry,Electronic, Optical and Magnetic Materials

Reference33 articles.

1. Diamond-like amorphous carbon;Robertson;Mater. Sci. Eng.,2002

2. A nearly frictionless and extremely elastic hydrogenated amorphous carbon film with self-assembled dual nanostructure;Liu;Adv. Mater.,2012

3. The influence of microstructural variations on mechanical and tribological properties of low-friction TiC/diamond-like carbon nanocomposite films;Liang;Ceram. Int.,2014

4. The effect of applied negative bias voltage on the structure of Ti-doped a-C:H films deposited by FCVA;Wang;Appl. Surf. Sci.,2007

5. Stress and structural properties of diamond-like carbon films deposited by electron beam excited plasma CVD

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