Principles for designing sputtering-based strategies for high-rate synthesis of dense and hard hydrogenated amorphous carbon thin films

Author:

Aijaz Asim,Sarakinos KostasORCID,Raza MohsinORCID,Jensen Jens,Helmersson UlfORCID

Funder

Swedish Research Council

Linköping University

Publisher

Elsevier BV

Subject

Electrical and Electronic Engineering,Materials Chemistry,Mechanical Engineering,General Chemistry,Electronic, Optical and Magnetic Materials

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4. Influence of ion energy and substrate temperature on the optical and electronic properties of tetrahedral amorphous carbon (ta-C) films;Chhowalla;J. Appl. Phys.,1997

5. Diamond-like amorphous carbon;Robertson;Mater. Sci. Eng. R.,2002

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