Author:
Cudin I.,De Bona F.,Gambitta A.,Pérennès F.,Turchet A.
Subject
Instrumentation,Nuclear and High Energy Physics
Reference6 articles.
1. Advanced Manufacturing Systems and Technology;De Bona,1996
2. Thermoelastic deformations of masks for deep X-ray lithography
3. Heat transport in masks for deep X-ray lithography during the irradiation process
4. Khounsary, D Chojnowski, D.C. Mancini, B. Lai, R. Dejus, SPIE 3151 (1997) 92.
5. MSC/Patran, the MacNeal Schwendler Corporation, Rel.8.0, Los Angeles, 1998.
Cited by
4 articles.
订阅此论文施引文献
订阅此论文施引文献,注册后可以免费订阅5篇论文的施引文献,订阅后可以查看论文全部施引文献