Influence of oxidation temperature on the microstructure and electrical properties of Ta2O5 on Si
Author:
Publisher
Elsevier BV
Subject
General Engineering
Reference35 articles.
1. Investigation on leakage current reduction of photo-CVD tantalum oxide films accomplished by active oxygen annealing;Tanimoto;J. Electrochem. Soc.,1992
2. Structural and electrical properties of Ta2O5 grown by plasma enhanced liquid source CVD using penta ethoxy tantalum source;Murawala;Jpn J. Appl. Phys.,1993
3. Thin Ta2O5 films prepared by low pressure metal organic CVD;Raush;Microelectron. J.,1993
4. Effect of deposition temperature on dielectric properties of PECVD Ta2O5 thin films;Moon;J. Mater. Sci.,1994
5. Microstructure and electrical properties of tantalum oxide thin film prepared by electron cyclotron resonance plasma-enhanced chemical vapor deposition;Kim;Jpn J. Appl. Phys.,1996
Cited by 37 articles. 订阅此论文施引文献 订阅此论文施引文献，注册后可以免费订阅5篇论文的施引文献，订阅后可以查看论文全部施引文献
1. Impact of varying wet oxidation temperature in the presence of nitrogen flow on hafnium tantalum oxide films;Ceramics International;2023-12
2. Growth of metal‐organic decomposed ternary Ga x Ce y O z films by nitrogen‐infused wet oxidation for metal‐oxide‐semiconductor capacitor;International Journal of Energy Research;2021-11-28
3. Exploratory studies on wet oxidation grown ternary hafnium tantalum oxide for metal‐oxide semiconductor application;International Journal of Energy Research;2021-11-14
4. Formation of cerium oxide film via post-sputter oxidation of cerium in nitrogen/oxygen/nitrogen ambient;Journal of Alloys and Compounds;2021-01
5. Growth and Characterization of Ternary HfxTayOz Films via Nitrogen-Infused Wet Oxidation;ACS Omega;2020-10-09
1.学者识别学者识别
2.学术分析学术分析
3.人才评估人才评估
"同舟云学术"是以全球学者为主线，采集、加工和组织学术论文而形成的新型学术文献查询和分析系统，可以对全球学者进行文献检索和人才价值评估。用户可以通过关注某些学科领域的顶尖人物而持续追踪该领域的学科进展和研究前沿。经过近期的数据扩容，当前同舟云学术共收录了国内外主流学术期刊6万余种，收集的期刊论文及会议论文总量共计约1.5亿篇，并以每天添加12000余篇中外论文的速度递增。我们也可以为用户提供个性化、定制化的学者数据。欢迎来电咨询！咨询电话：010-8811{复制后删除}0370
www.globalauthorid.com
TOP
Copyright © 2019-2024 北京同舟云网络信息技术有限公司 京公网安备11010802033243号 京ICP备18003416号-3