A study on surface roughness in ion-beam machining-Reference-Cited by-同舟云学术

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A study on surface roughness in ion-beam machining

Published:1990-07 Issue:3 Volume:12 Page:157-163
ISSN:0141-6359
Container-title:Precision Engineering
language:en
Short-container-title:Precision Engineering

Author:

Shima T.,Inoue N.

Publisher

Elsevier BV

Subject

General Engineering

Reference13 articles.

1. Ion-Beam Etching;Gloersen;J Vac Sci Technol,1975

2. Microfabrication by Ion-Beam Etching;Lee;J Vac Sci Technol.,1979

3. Stud of the Ion Sputter-Machining (2nd report) Fine Machining of Diamond;Miyamoto;J Jpn Soc Prec Eng,1980

4. Ion Beam Machining on Ceramic;Taniguchi;J Ind Mater Jpn,1980

5. Ion Etching for Pattern Delineation;Mellier-Smith;J Vac Sci Technol,1976

Cited by 12 articles. 订阅此论文施引文献订阅此论文施引文献，注册后可以免费订阅5篇论文的施引文献，订阅后可以查看论文全部施引文献

1. Frequency Scaling Millimeter Wave Acoustic Resonators using Ion Beam Trimmed Lithium Niobate;2023 Joint Conference of the European Frequency and Time Forum and IEEE International Frequency Control Symposium (EFTF/IFCS);2023-05-15

2. Development of ion beam sputtering technology for surface smoothing of materials;Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms;2007-08

3. SURFACE INTEGRITY AND REMOVAL RATE OF SILICON SPUTTERED WITH FOCUSED ION BEAM;Machining Science and Technology;2001-07-31

4. Improvement of surface roughness by oxygen ion beam machining;Nanotechnology;1995-10-01

5. Critical etching time to maintain high Tc of Bi-oxide;Advances in Superconductivity VI;1994

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