Properties of the SiH bond-stretching absorption band in a-Si:H grown by remote plasma enhanced CVD (RPECVD)
Author:
Publisher
Elsevier BV
Subject
Materials Chemistry,Condensed Matter Physics,Ceramics and Composites,Electronic, Optical and Magnetic Materials
Reference6 articles.
1. Deposition of silicon dioxide and silicon nitride by remote plasma enhanced chemical vapor deposition
2. G Lucovsky and DV Tsu, these proceedings.
3. Structural interpretation of the vibrational spectra ofa-Si: H alloys
4. GN Parsons, DV Tsu and G Lucovsky, these proceedings.
5. Chemical effects on the frequencies of Si-H vibrations in amorphous solids
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