Author:
Krankenhagen R.,Schmidt M.,Grebner S.,Poschenrieder M.,Henrion W.,Sieber I.,Koynov S.,Schwarz R.
Subject
Materials Chemistry,Condensed Matter Physics,Ceramics and Composites,Electronic, Optical and Magnetic Materials
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4. Closed-Chamber Chemical Vapor Deposition: New Cyclic Method for Preparation of Microcrystalline Silicon Films
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