Defects in amorphous hydrogenated silicon nitride films

Author:

Kanicki J.,Warren W.L.

Publisher

Elsevier BV

Subject

Materials Chemistry,Condensed Matter Physics,Ceramics and Composites,Electronic, Optical and Magnetic Materials

Cited by 20 articles. 订阅此论文施引文献 订阅此论文施引文献,注册后可以免费订阅5篇论文的施引文献,订阅后可以查看论文全部施引文献

1. Reversible and Non-Volatile Optical Phase Shift in Silicon Nitride Waveguide;2024 IEEE Silicon Photonics Conference (SiPhotonics);2024-04-15

2. Silicon-Nitride-based Passive Photonic Platform for Visible and Telecommunications Wavelength Regions;2023 Opto-Electronics and Communications Conference (OECC);2023-07-02

3. Transient Thermal and Electrical Co-Optimization of BEOL Top-Gated ALD In2O3 FETs Toward Monolithic 3-D Integration;IEEE Transactions on Electron Devices;2023-04

4. Investigation on Light Stability of Injected Charge in α-SiNx: H by Plasma Charge Injection Technology;2021 IEEE 48th Photovoltaic Specialists Conference (PVSC);2021-06-20

5. Blue and red light-emitting non-stoichiometric silicon nitride-based structures;Proceedings of the National Academy of Sciences of Belarus. Physics and Mathematics Series;2018-11-01

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