Dual ion beam sputtering vanadium dioxide microbolometers by surface micromachining-Reference-Cited by-同舟云学术

Dual ion beam sputtering vanadium dioxide microbolometers by surface micromachining

Published:2002-06 Issue:3-5 Volume:43 Page:245-250
ISSN:1350-4495
Container-title:Infrared Physics & Technology
language:en
Short-container-title:Infrared Physics & Technology

Author:

Zintu D,Tosone G,Mercuri A

Publisher

Elsevier BV

Subject

Condensed Matter Physics,Atomic and Molecular Physics, and Optics,Electronic, Optical and Magnetic Materials

Reference17 articles.

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2. C. Corsi, in: Proceeding of the 5th AITA, Venezia, September 29–30, 1999, pp. 3–9

3. Infrared Detectors and Systems;Dereniak,1996

4. Infrared Detectors and Systems;Dereniak,1996

5. Uncooled infrared imaging arrays and systems;Wood,1997

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