Thermal oxidation of [0001] GaN in water vapor compared with dry and wet oxidation: Oxide properties and impact on GaN-Reference-Cited by-同舟云学术

Thermal oxidation of [0001] GaN in water vapor compared with dry and wet oxidation: Oxide properties and impact on GaN

Published:2022-10 Issue: Volume:598 Page:153872
ISSN:0169-4332
Container-title:Applied Surface Science
language:en
Short-container-title:Applied Surface Science

Author:

Janicki Łukasz,Korbutowicz Ryszard,Rudziński Mariusz,Michałowski Paweł Piotr,Złotnik Sebastian,Grodzicki Miłosz,Gorantla Sandeep,Serafińczuk Jarosław,Hommel Detlef,Kudrawiec Robert

Funder

Narodowe Centrum Nauki

Publisher

Elsevier BV

Subject

Surfaces, Coatings and Films,Condensed Matter Physics,Surfaces and Interfaces,General Physics and Astronomy,General Chemistry

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