Improvement in dispersion stability of alumina suspensions and corresponding chemical mechanical polishing performance-Reference-Cited by-同舟云学术

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Improvement in dispersion stability of alumina suspensions and corresponding chemical mechanical polishing performance

Published:2022-09 Issue: Volume:597 Page:153703
ISSN:0169-4332
Container-title:Applied Surface Science
language:en
Short-container-title:Applied Surface Science

Author:

Wang Wantang,Zhang Baoguo,Shi Yunhui,Zhou Dengke,Wang Ru

Publisher

Elsevier BV

Subject

Surfaces, Coatings and Films,Condensed Matter Physics,Surfaces and Interfaces,General Physics and Astronomy,General Chemistry

Reference80 articles.

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2. Unprecedented Piezoresistance Coefficient in Strained Silicon Carbide;Cui;Nano Lett.,2019

3. Ultrahigh Recovery of Fracture Strength on Mismatched Fractured Amorphous Surfaces of Silicon Carbide;Cui;ACS Nano,2019

4. Tribological behavior of 6H–SiC wafers in different chemical mechanical polishing slurries;Zhang;Wear,2021

5. Synergistic effect of photocatalysis and fenton on improving the removal rate of 4H-SiC during CMP;Lu;Ecs J Solid State Sc,2021

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