Flattening of low temperature epitaxial Ge1−xSnx/Ge/Si(100) alloys via mass transport during post-growth annealing-Reference-Cited by-同舟云学术

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Flattening of low temperature epitaxial Ge1−xSnx/Ge/Si(100) alloys via mass transport during post-growth annealing

Published:2011-02 Issue:9 Volume:257 Page:4468-4471
ISSN:0169-4332
Container-title:Applied Surface Science
language:en
Short-container-title:Applied Surface Science

Author:

Wang Wei,Su Shaojian,Zheng Jun,Zhang Guangze,Xue Chunlai,Zuo Yuhua,Cheng Buwen,Wang Qiming

Funder

National High Technology Research and Development Program of China

National Basic Research Program of China

National Natural Science Foundation

Publisher

Elsevier BV

Subject

Surfaces, Coatings and Films,Condensed Matter Physics,Surfaces and Interfaces,General Physics and Astronomy,General Chemistry

Reference18 articles.

1. Mid-infrared photonics in silicon and germanium

2. Extended performance GeSn/Si(100) p-i-n photodetectors for full spectral range telecommunication applications

3. Low-temperature growth and critical epitaxial thicknesses of fully strained metastable Ge1−xSnx (x≲0.26) alloys on Ge(001)2×1

4. Sn-mediated Ge∕Ge(001) growth by low-temperature molecular-beam epitaxy: Surface smoothening and enhanced epitaxial thickness

5. Semiconductor molecular‐beam epitaxy at low temperatures

Cited by 8 articles. 订阅此论文施引文献订阅此论文施引文献，注册后可以免费订阅5篇论文的施引文献，订阅后可以查看论文全部施引文献

1. Crystallization of GeSn thin films deposited on Ge(100) substrate by magnetron sputtering;Materials Science in Semiconductor Processing;2018-12

2. Synthesis of Ge1−xSnx Alloy Thin Films by Rapid Thermal Annealing of Sputtered Ge/Sn/Ge Layers on Si Substrates;Materials;2018-11-12

3. Recent progress in GeSn growth and GeSn-based photonic devices;Journal of Semiconductors;2018-05-29

4. Effect of substrate temperature on the morphological, structural, and optical properties of RF sputtered Ge 1− x Sn x films on Si substrate;Chinese Physics B;2017-05

5. Effects of post-deposition annealing on crystalline state of GeSn thin films sputtered on Si substrate and its application to MSM photodetector;Materials Research Express;2016-10-10

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