Reaction dynamics simulation of MoO2 cluster precursor with melting, deoxygenation and sulfuration for MoS2 growth by chemical vapor deposition
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Published:2024-10
Issue:
Volume:669
Page:160435
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ISSN:0169-4332
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Container-title:Applied Surface Science
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language:en
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Short-container-title:Applied Surface Science
Author:
Wang Qi-Bo,
Han Zhen-Hua,
Xu Qin-QinORCID,
Cheng Tong,
Yin Jian-Zhong