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Site-controlled fabrication of silicon nanotips by indentation-induced selective etching

  • Published:2017-12 Issue: Volume:425 Page:227-232
  • ISSN:0169-4332
  • Container-title:Applied Surface Science
  • language:en
  • Short-container-title:Applied Surface Science

Author:

Jin Chenning,Yu Bingjun,Liu Xiaoxiao,Xiao Chen,Wang Hongbo,Jiang Shulan,Wu Jiang,Liu Huiyun,Qian Linmao

Funder

Natural Science Foundation of China

Fundamental Research Funds for the Central Universities

Publisher

Elsevier BV

Subject

Surfaces, Coatings and Films,Condensed Matter Physics,Surfaces and Interfaces,General Physics and Astronomy,General Chemistry

Reference37 articles.

1. Manufacturing Techniques for Microfabrication and Nanotechnology;Madou,2011

2. Selected Topics in Nanoscience and Nanotechnology;Wee,2009

3. Narrow spectral linewidth from single site-controlled In(Ga)As quantum dots with high uniformity;Huggenberger;Appl. Phys. Lett.,2011

4. Site-controlled fabrication of Ga nanodroplets by focused ion beam;Xu;Appl. Phys. Lett.,2014

5. Wafer-level site-controlled growth of silicon nanowires by Cu pattern dewetting;Yuan;Nano Res.,2015

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4. Friction-Induced Nanofabrication: A Review;Chinese Journal of Mechanical Engineering;2021-03-17

5. Effects of crystal planes on topography evolution of silicon surface during nanoscratch-induced selective etching;Materials Science in Semiconductor Processing;2021-03
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