Author:
Pustan Marius,Birleanu Corina,Dudescu Cristian
Funder
Romanian National Authority for Scientific Research and Innovation
Subject
Surfaces, Coatings and Films,Condensed Matter Physics,Surfaces and Interfaces,General Physics and Astronomy,General Chemistry
Reference16 articles.
1. Micro System Technologies 90;Mohr,1990
2. Static response and stiction analysis of MEMS micromembranes for optical applications;Pustan;Phys. Status Solidi (c),2015
3. Mechanical and tribological properties of thin films under changes of temperature conditions;Voicu;Surf. Coat. Technol.,2015
4. Surface chemistry and tribology of MEMS;Maboudian;Annu. Rev. Phys. Chem.,2004
5. Reliability of MEMS: Testing of Materials and Devices;Brand,2013
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