Correlation between optical properties and Si nanocrystal formation of Si-rich Si oxide films prepared by plasma-enhanced chemical vapor deposition-Reference-Cited by-同舟云学术

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Correlation between optical properties and Si nanocrystal formation of Si-rich Si oxide films prepared by plasma-enhanced chemical vapor deposition

Published:2006-12 Issue:5 Volume:253 Page:2718-2726
ISSN:0169-4332
Container-title:Applied Surface Science
language:en
Short-container-title:Applied Surface Science

Author:

Chen X.Y.,Lu Y.F.,Wu Y.H.,Cho B.J.,Tang L.J.,Lu D.,Dong J.R.

Publisher

Elsevier BV

Subject

Surfaces, Coatings and Films,Condensed Matter Physics,Surfaces and Interfaces,General Physics and Astronomy,General Chemistry

Reference27 articles.

1. Three-Dimensional Quantum Well Effects in Ultrafine Silicon Particles

2. Quantum size effects on photoluminescence in ultrafine Si particles

3. Silicon quantum wire array fabrication by electrochemical and chemical dissolution of wafers

4. Deposition and analysis of silicon clusters generated by laser‐induced gas phase reaction

5. Synthesis and processing of silicon nanocrystallites using a pulsed laser ablation supersonic expansion method

Cited by 10 articles. 订阅此论文施引文献订阅此论文施引文献，注册后可以免费订阅5篇论文的施引文献，订阅后可以查看论文全部施引文献

1. High-precision determination of silicon nanocrystals: optical spectroscopy versus electron microscopy;Semiconductor Science and Technology;2019-08-13

2. Electrical Properties of Composite Films with Silicon Nanocrystals in the Insulating Matrix;Advanced Materials Research;2013-11

3. Structural properties of nanocomposite SiO2 (Si) films obtained by ion-plasma sputtering and thermal annealing;Semiconductor Physics Quantum Electronics and Optoelectronics;2011-06-30

4. Determination of the energy states of the donor acceptor decay emission in silicon rich oxide prepared by low-pressure chemical vapor deposition;Journal of Vacuum Science & Technology B, Nanotechnology and Microelectronics: Materials, Processing, Measurement, and Phenomena;2011-03

5. (Invited) Synthesis and Characterization of Group IV Nanocrystals;ECS Transactions;2010-04-16

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