Preparation and characterization of C54 TiSi2 nanoislands on Si (111) by laser deposition of TiO2
Author:
Publisher
Elsevier BV
Subject
Surfaces, Coatings and Films,Condensed Matter Physics,Surfaces and Interfaces,General Physics and Astronomy,General Chemistry
Reference28 articles.
1. Silicides and local interconnections for high-performance VLSI applications
2. Silicide interfaces in silicon technology
3. Dependence of the C49–C54 TiSi2 phase transition temperature on film thickness and Si substrate orientation
4. C49-C54 phase transition in nanometric titanium disilicide grains
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3. Fabrication of topographically microstructured titanium silicide interface for advanced photonic applications;Scripta Materialia;2016-07
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