Sub-nanometer heating depth of atomic layer annealing-Reference-Cited by-同舟云学术

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Sub-nanometer heating depth of atomic layer annealing

Published:2020-09 Issue: Volume:525 Page:146615
ISSN:0169-4332
Container-title:Applied Surface Science
language:en
Short-container-title:Applied Surface Science

Author:

Lee Wei-Hao,Kao Wei-Chung,Yin Yu-Tung,Yi Sheng-Han,Huang Kuei-Wen,Lin Hsin-Chih,Chen Miin-Jang

Funder

Taiwan Semiconductor Manufacturing Company

Ministry of Science and Technology

Publisher

Elsevier BV

Subject

Surfaces, Coatings and Films,Condensed Matter Physics,Surfaces and Interfaces,General Physics and Astronomy,General Chemistry

Reference33 articles.

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2. Nonlinear gallium phosphide nanoscale photonics [Invited];Martin;Photon. Res.,2018

3. Plasmonics: Merging photonics and electronics at nanoscale dimensions;Ozbay;Science,2006

4. Micro- and nanoscale engineering of cell signaling;Kam;Annu. Rev. Biomed. Eng.,2013

5. Nanostructured metal sulfides for energy storage;Rui;Nanoscale,2014

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