Aluminium oxide formation via atomic layer deposition using a polymer brush mediated selective infiltration approach-Reference-Cited by-同舟云学术

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Aluminium oxide formation via atomic layer deposition using a polymer brush mediated selective infiltration approach

Published:2020-06 Issue: Volume:515 Page:145987
ISSN:0169-4332
Container-title:Applied Surface Science
language:en
Short-container-title:Applied Surface Science

Author:

Snelgrove M.,McFeely C.,Mani-Gonzalez P.G.,Lahtonen K.,Lundy R.,Hughes G.,Valden M.,McGlynn E.,Yadav P.,Saari J.,Morris M.A.,O'Connor R.

Funder

Science Foundation Ireland

Publisher

Elsevier BV

Subject

Surfaces, Coatings and Films,Condensed Matter Physics,Surfaces and Interfaces,General Physics and Astronomy,General Chemistry

Reference48 articles.

1. Block copolymer lithography: merging “bottom-up” with “top-down” processes;Hawker;MRS Bull.,2005

2. Directed self-assembly of block copolymers for nanocircuitry fabrication;Morris;Microelectron. Eng.,2015

3. Creating active device materials for nanoelectronics using block copolymer lithography;Cummins;Nanomaterials,2017

4. Area selective polymer brush deposition;Cummins;Macromol. Rapid Commun.,2017

5. Enabling large-area selective deposition on metal-dielectric patterns using polymer brush deactivation;Cummins;J. Phys. Chem. C,2018

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1. Effect of Co-Reactants on Interfacial Oxidation in Atomic Layer Deposition of Oxides on Metal Surfaces;ACS Applied Materials & Interfaces;2024-03-20

2. Plasma-enhanced atomic layer deposition of nickel and nickel oxide on silicon for photoelectrochemical applications;Journal of Physics D: Applied Physics;2023-07-13

3. Sequential Infiltration Synthesis with Organic Co-reactants for Extensively Swollen Organic-Inorganic Hybrid Thin Films;ACS APPL POLYM MATER;2023

4. Sequential Infiltration Synthesis with Organic Co-reactants for Extensively Swollen Organic–Inorganic Hybrid Thin Films;ACS Applied Polymer Materials;2022-12-12

5. Enhancement of the photovoltaic performance of perovskite solar cells via sono‐synthesis of Al‐doped TiO ₂ as the electron transport layer;International Journal of Energy Research;2022-09

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