Effect of rapid thermal annealing on the surface properties of the microlens arrays machined on monocrystalline silicon-Reference-Cited by-同舟云学术

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Effect of rapid thermal annealing on the surface properties of the microlens arrays machined on monocrystalline silicon

Published:2024-04 Issue: Volume:652 Page:159314
ISSN:0169-4332
Container-title:Applied Surface Science
language:en
Short-container-title:Applied Surface Science

Author:

Pu Xiaonan^ORCID,Du Hanheng^ORCID,Xu Jianghai^ORCID,Huang Peng^ORCID,Zhu Zhiwei

Publisher

Elsevier BV

Reference47 articles.

1. A universal 3D imaging sensor on a silicon photonics platform;Rogers;Nature.,2021

2. Large-scale optical phased array using a low-power multi-pass silicon photonic platform;Miller;Optica.,2020

3. Flat optics for image differentiation;Zhou;Nat. Photonics.,2020

4. Flexible Transient Optical Waveguides and Surface-Wave Biosensors Constructed from Monocrystalline Silicon;Bai;Adv. Mater.,2018

5. Fundamental investigation of subsurface damage in single crystalline silicon caused by diamond machining;Yan;Precis. Eng.,2009

Cited by 2 articles. 订阅此论文施引文献订阅此论文施引文献，注册后可以免费订阅5篇论文的施引文献，订阅后可以查看论文全部施引文献

1. Study on Deformation Behavior of Glass in High-temperature Molding for Massive Unit Microlens Arrays;ACS Applied Materials & Interfaces;2024-07-31

2. In-situ TEM investigation of dislocation healing and recrystallization in nanoscratched silicon at elevated temperatures up to 800 °C;Journal of Materials Research and Technology;2024-07

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