Microstructure and electrical characterization based on AFM of very high-doped polysilicon grains-Reference-Cited by-同舟云学术

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Microstructure and electrical characterization based on AFM of very high-doped polysilicon grains

Published:2007-05 Issue:14 Volume:253 Page:6006-6012
ISSN:0169-4332
Container-title:Applied Surface Science
language:en
Short-container-title:Applied Surface Science

Author:

Coq Germanicus R.,Picard E.,Domenges B.,Danilo K.,Rogel R.

Publisher

Elsevier BV

Subject

Surfaces, Coatings and Films,Condensed Matter Physics,Surfaces and Interfaces,General Physics and Astronomy,General Chemistry

Reference27 articles.

1. Invited Paper at the 20th SB Micro Conference;Roozeboom,2005

2. D. Chevrie, C. Bunel, Y. Bouttement, S. Bardy, L. Hamelin, E. Van Grunsven, M. Burghoorn, M. de Samber EMPC 2005, June 12–15, Brugge, Belgium.

3. Theory of the electrical and photovoltaic properties of polycrystalline silicon

4. Morel IEEE Electron Devices Meeting, vol. 28;Colinge,1982

5. Proceedings of the 11th Biennial Conference on Insulating Films Semiconductors;Eccleston,1999

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