Author:
Ohba Nobuko,Ogata Shuji,Kouno Takahisa,Tamura Tomoyuki,Kobayashi Ryo
Funder
JST Core Research for Evolutional Science and Technology (CREST)
JSPS KAKENHI
MEXT Strategic Programs for Innovative Research (SPIRE)
Computational Materials Science Initiative (CMSI)
MEXT Open Advanced Research Facilities Initiative
Information Technology Center of Nagoya University
Subject
General Physics and Astronomy,Hardware and Architecture
Reference57 articles.
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5. MEMS Materials Processes Handbook;Ghodssi,2011
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