Gettering of Pd and Cu by nanocavities and dislocations in Si
Author:
Publisher
Elsevier BV
Subject
Instrumentation,Nuclear and High Energy Physics
Reference15 articles.
1. Transition metals in silicon and their gettering behaviour
2. Lateral gettering of iron by cavities induced by helium implantation in silicon
3. Study of the trapping of CoFe impurities at the internal wall of nanosized Si voids
4. Gettering of nickel to cavities in silicon introduced by hydrogen implantation
5. Binding of Copper to Nanocavities in Silicon
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1. Formation of Cu nanoparticles and Cu3Si phase in Si by ion implantation;Composites Communications;2020-10
2. The effects of swift heavy-ion irradiation on helium-ion-implanted silicon;Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms;2014-10
3. Decrease of Point Defect Concentration at a Surface of ZnO/Si Heterostructure by Powerful Laser Radiation;Advanced Materials Research;2011-04
4. The effects of the annealing time on helium implantation in Si;Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms;2010-11
5. Surface Energy of Nanostructural Materials with Negative Curvature and Related Size Effects;Chemical Reviews;2009-08-11
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