Cluster ion beam process technology – 20 years of R&D history
Author:
Publisher
Elsevier BV
Subject
Instrumentation,Nuclear and High Energy Physics
Reference16 articles.
1. On the history of cluster beams;Becker,1986
2. An investigation of cluster formation in an ionized cluster beam deposition source
3. Ion cluster beam deposition of thin films
4. Investigation of ionized cluster beam bombardment and its applications for materials modification
5. Materials processing by gas cluster ion beams
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