Characteristics of Cu films prepared using a magnetron sputter type negative ion source (MSNIS)
Author:
Publisher
Elsevier BV
Subject
Instrumentation,Nuclear and High Energy Physics
Reference20 articles.
1. In situ x-ray microscopic observation of the electromigration in passivated Cu interconnects
2. On the unusual electromigration behavior of copper interconnects
3. Evaluating the Large Electromigration Resistance of Copper Interconnects Employing a Newly Developed Accelerated Life‐Test Method
4. Characterization of diamond-like carbon (DLC) films deposited by a magnetron-sputter-type negative ion source (MSNIS)
5. N. Paik, Diamond Relat. Mat., to be published. doi:10.1016/j.diamond.2004.11.005
Cited by 10 articles. 订阅此论文施引文献 订阅此论文施引文献，注册后可以免费订阅5篇论文的施引文献，订阅后可以查看论文全部施引文献
1. HOT SWIR detector technology for both passive and active imaging applications;Infrared Technology and Applications XLVIII;2022-05-27
2. Low capacitance SWIR photodetectors for high speed sensing applications;Infrared Technology and Applications XLVI;2020-05-26
3. Fabrication of high aspect ratio bumps for focal plane arrays applications;Infrared Technology and Applications XLV;2019-05-07
4. Development of an improved version of sample holder for measuring the shielding effectiveness of planar films;International Journal of Applied Electromagnetics and Mechanics;2014-05-06
5. Characterisation of copper thin films deposited on machinable glass–ceramic and glass by DC magnetron sputtering;IET Science, Measurement & Technology;2014-01
1.学者识别学者识别
2.学术分析学术分析
3.人才评估人才评估
"同舟云学术"是以全球学者为主线，采集、加工和组织学术论文而形成的新型学术文献查询和分析系统，可以对全球学者进行文献检索和人才价值评估。用户可以通过关注某些学科领域的顶尖人物而持续追踪该领域的学科进展和研究前沿。经过近期的数据扩容，当前同舟云学术共收录了国内外主流学术期刊6万余种，收集的期刊论文及会议论文总量共计约1.5亿篇，并以每天添加12000余篇中外论文的速度递增。我们也可以为用户提供个性化、定制化的学者数据。欢迎来电咨询！咨询电话：010-8811{复制后删除}0370
www.globalauthorid.com
TOP
Copyright © 2019-2024 北京同舟云网络信息技术有限公司 京公网安备11010802033243号 京ICP备18003416号-3