Energy filter for tailoring depth profiles in semiconductor doping application-Reference-Cited by-同舟云学术

Energy filter for tailoring depth profiles in semiconductor doping application

Published:2015-12 Issue: Volume:365 Page:182-186
ISSN:0168-583X
Container-title:Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms
language:en
Short-container-title:Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms

Author:

Csato Constantin,Krippendorf Florian,Akhmadaliev Shavkat,von Borany Johannes,Han Weiqi,Siefke Thomas,Zowalla Andre,Rüb Michael

Funder

Ernst-Abbe-Hochschule Jena

German Federal Ministry of Education and Science

Publisher

Elsevier BV

Subject

Instrumentation,Nuclear and High Energy Physics

Reference13 articles.

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