Fabrication of monolithic microfluidic channels in diamond with ion beam lithography-Reference-Cited by-同舟云学术

Fabrication of monolithic microfluidic channels in diamond with ion beam lithography

Published:2017-08 Issue: Volume:404 Page:193-197
ISSN:0168-583X
Container-title:Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms
language:en
Short-container-title:Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms

Author:

Picollo F.,Battiato A.,Boarino L.,Ditalia Tchernij S.,Enrico E.,Forneris J.,Gilardino A.,Jakšić M.,Sardi F.,Skukan N.,Tengattini A.,Olivero P.,Re A.,Vittone E.

Publisher

Elsevier BV

Subject

Instrumentation,Nuclear and High Energy Physics

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