Depth profile investigation of β-FeSi2 formed in Si(100) by high fluence implantation of 50keV Fe ion and post-thermal vacuum annealing
Author:
Publisher
Elsevier BV
Subject
Instrumentation,Nuclear and High Energy Physics
Reference25 articles.
1. Organometallic Routes into the Nanorealms of Binary Fe-Si Phases
2. Constitution of Binary Alloy;Hansen,1958
3. High-resolution electron microscopy study of αFeSi2 heteroepitaxy on Si(111)
4. Cohesive, structural, and electronic properties of Fe-Si compounds
5. Rod-like β-FeSi2 phase grown on Si (111) substrate
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1. Observation of room-temperature superparamagnetic behavior of Fe5Si3 nanocrystals synthesized via 50 keV Fe ion implantation in silicon;Applied Physics A;2020-02-26
2. Iron ions distribution profile obtained by irradiating the silicon single crystal;Journal of Physics: Conference Series;2017-11
3. Study of the distribution profile of iron ions implanted into silicon;Semiconductors;2017-06
4. Formation of Fe-Co-Si Structure in Fe and Co Implanted Si Substrate;MRS Advances;2017-03-23
5. Investigation of various phases of Fe–Si structures formed in Si by low energy Fe ion implantation;Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms;2015-12
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